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The K-Patents PR-23-MS measures real-time the liquid chemical concentrations through the whole semiconductor fabrication process, i.e. from chemical supplies down to fab in-line and tool in-situ chemical quality control. The concentration of dissolved solids is determined by making an optical measurement of the solution’s refractive index. The advantage of this principle is that the same instrument can be used to measure any chemical.
The PR-23-MS provides a continuous 4-20 mA or digital measurement signal, which offers many possibilities for real-time monitoring and process control in. It is physically small and easy to install in the bulk chemicals supply and distribution, and in point of use chemical blending, mixing, dilution and spiking applications.
For example, low and high concentration alarms can be configured to prevent wrong liquids reaching the fabrication process and thus avoid costly production problems and equipment damage. The rationale behind this statement is that changes in chemical quality can occur during in-house handling and storage. Factors such as human error in container handling and equipment failure at the distribution point are now also accounted. The PR-23-MS activates an alarm if the chemical is not within the pre-set specifications. In some cases, the K-Patents PR-23-MS has paid for itself by preventing a single mishap.
See the PR-23-MS product pages for more information.