In-line Refractive Index in Assay Characterization of Incoming Fresh and Effluent Spent CMP Slurry
- White Papers
White Paper: In-line refractive index (RI) measurements are the technique of choice for qualifying the hydrogen peroxide content in CMP slurries. However, peroxide content is not the only slurry metric of interest. Typically, slurries are delivered from the manufacturer in concentrated form, then diluted with water and peroxide at the fab. Though slurry density is a critical parameter for CMP performance, incoming density can vary from batch to batch.