The solution to the overall problem is not a single device or scheme, but rather a set of devices and a change to fundamental thinking in the chemical distribution area. Supporting data and other relevant experimental results will also be discussed to support and reinforce the findings.
In-Situ Chemical Monitoring in Semiconductor Fabrication Chemical Supplies
- White Papers
White Paper: In-coming chemical quality has been left to the chemical suppliers. Semiconductor fabricators have very limited or no capability to detect problems with process chemistries from their suppliers. It was found that product is exposed to any incoming chemical changes, no matter what the cause, supplier, mechanical or human. In fact it can be said that the product is used as a monitoring method for the chemicals. This paper will discuss a variety of different monitoring methodologies; suggest the best practices for a cost efficient application for a wide variety of semiconductor chemistries.